Dynamic modeling of a polymer composite based hard-magnetic micro-mirror

Author

Li, Guanlin ; Zuo, Peng ; Xie, Wei ; Yeow, John T.W.

Author_Institution

College of Automation Science and Engineering, South China University of Technology, Guangzhou, Peoples Republic of China 510641

fYear

2015

fDate

28-30 July 2015

Firstpage

8362

Lastpage

8367

Abstract

In this work, we focus on the dynamic modeling of an electromagnetically actuated bidirectional scanner with potential applications in biomedical applications. A 250μm thick magnetic mirror is fabricated by a polymer composite of PDMS and Nd-Fe-B micropowder (MQFP-12-5) and actuated by external spiral coils. The system model consists of three parts: (i) the magnetic field intensity produced by coils; (ii) forces and magnetostatic torsion on the hard-magnetic film; (iii) the dynamic deflection of the mirror under the magnetic torsion. The effectiveness of model is verified by the finite element model (FEM) results and experimental results. This paper presents a detailed comparative analysis of the the steady state value of the deflection angle and transient response of the micromirror.

Keywords

Coils; Finite element analysis; Magnetic resonance imaging; Mathematical model; Micromirrors; Soft magnetic materials; Electromagnetically actuated; FEM; Micromirror; dynamic modele; hard-magnetic;

fLanguage

English

Publisher

ieee

Conference_Titel

Control Conference (CCC), 2015 34th Chinese

Conference_Location

Hangzhou, China

Type

conf

DOI

10.1109/ChiCC.2015.7260968

Filename

7260968