Title :
Voltage amplitude and voltage phase mapping within sub-/spl mu/m devices by high frequency scanning force microscopy
Author :
Leyk, A. ; Bohm, C. ; Kubalek, E.
Author_Institution :
Werkstoffe der Elektrotechnik, Gerhard-Mercator-Univ., Duisburg, Germany
Abstract :
For detailed failure analysis of monolithic microwave integrated circuits (MMIC), device internal test systems, featuring simultaneously high spatial resolution, GHz voltage measurement ability and topographic imaging, must be used. Scanning force microscope testing proved suitable, but former microwave measurements within submicron devices focused on point measurements, only. Now we present for the first time mappings of submicron device internal MMIC signals at 8 GHz on 500 nm structures. A spatial resolution of 80 nm is achieved.
Keywords :
MMIC; atomic force microscopy; failure analysis; integrated circuit testing; microscopy; microwave imaging; microwave measurement; phase measurement; surface topography measurement; voltage measurement; 500 nm; 8 GHz; 80 nm; AFM; GHz voltage measurement ability; HF scanning force microscopy; SFM; SHF; failure analysis; high spatial resolution; internal MMIC signals; microwave measurement; monolithic microwave integrated circuits; submicron devices; topographic imaging; voltage amplitude mapping; voltage phase mapping; Circuit testing; Failure analysis; Force measurement; Integrated circuit measurements; MMICs; Microwave devices; Microwave integrated circuits; Microwave measurements; Spatial resolution; Voltage;
Conference_Titel :
Microwave Symposium Digest, 1996., IEEE MTT-S International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3246-6
DOI :
10.1109/MWSYM.1996.512226
