Title :
Design and characterization of integrated probes for millimeter wave applications in scanning probe microscopy
Author :
Bohm, C. ; Otterbeck, M. ; Lipp, S. ; Frey, L. ; Reuter, R. ; Leyk, A. ; Mertin, W. ; Tegude, F.J. ; Kubalek, E.
Author_Institution :
Fachgebiet Werkstoffe der Elektrotechnik, Gerhard-Mercator-Univ., Duisburg, Germany
Abstract :
Scanning probe microscopy has developed to a powerful tool in surface topography and is going to become a characterization method for electrical potentials of monolithic microwave integrated circuits. Measurement bandwidths above 100 GHz force the development of optimized millimeter wave proximal probes with simultaneously nanometer spatial resolution. We present the design, production and characterization of such proximal probes using integrated planar waveguides well suited for the millimeter wave range keeping the nanometer spatial resolution of the tip for topography measurements.
Keywords :
MMIC; integrated circuit measurement; microscopy; millimetre wave measurement; planar waveguides; scanning probe microscopy; 100 GHz; design; electrical potential; integrated planar waveguide; monolithic microwave integrated circuit; nanometer spatial resolution; optimized millimeter wave proximal probe; scanning probe microscopy; surface topography measurement; Electric potential; Force measurement; MIMICs; Microwave integrated circuits; Microwave theory and techniques; Millimeter wave measurements; Millimeter wave technology; Scanning probe microscopy; Spatial resolution; Surface topography;
Conference_Titel :
Microwave Symposium Digest, 1996., IEEE MTT-S International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3246-6
DOI :
10.1109/MWSYM.1996.512227
