Design and characterization of integrated probes for millimeter wave applications in scanning probe microscopy

Author

Bohm, C. ; Otterbeck, M. ; Lipp, S. ; Frey, L. ; Reuter, R. ; Leyk, A. ; Mertin, W. ; Tegude, F.J. ; Kubalek, E.

Author_Institution

Fachgebiet Werkstoffe der Elektrotechnik, Gerhard-Mercator-Univ., Duisburg, Germany

Volume

3

fYear

1996

fDate

17-21 June 1996

Firstpage

1529

Abstract

Scanning probe microscopy has developed to a powerful tool in surface topography and is going to become a characterization method for electrical potentials of monolithic microwave integrated circuits. Measurement bandwidths above 100 GHz force the development of optimized millimeter wave proximal probes with simultaneously nanometer spatial resolution. We present the design, production and characterization of such proximal probes using integrated planar waveguides well suited for the millimeter wave range keeping the nanometer spatial resolution of the tip for topography measurements.

Keywords

MMIC; integrated circuit measurement; microscopy; millimetre wave measurement; planar waveguides; scanning probe microscopy; 100 GHz; design; electrical potential; integrated planar waveguide; monolithic microwave integrated circuit; nanometer spatial resolution; optimized millimeter wave proximal probe; scanning probe microscopy; surface topography measurement; Electric potential; Force measurement; MIMICs; Microwave integrated circuits; Microwave theory and techniques; Millimeter wave measurements; Millimeter wave technology; Scanning probe microscopy; Spatial resolution; Surface topography;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1996., IEEE MTT-S International

Conference_Location

San Francisco, CA, USA

ISSN

0149-645X

Print_ISBN

0-7803-3246-6

Type

conf

DOI

10.1109/MWSYM.1996.512227

Filename

512227