Title :
Two-photon polymerization with femtosecond pulses and fabrication of microoptical devices and photonic structures
Author :
Serbin, J. ; Fallnich, C. ; Chichkov, B.N.
Author_Institution :
Laser Zentrum Hannover e.V., Germany
Abstract :
Summary form only given. Investigations of a two photon polymerization technique and its potential for the fabrication of low-loss, high-performance microoptical devices will be discussed. The resins we use are designed for ultraviolet photolithography and contain photo-initiators sensitive to 390 nm radiation. These resins are exposed to tightly focused 80-fs Ti:sapphire laser pulses initiating two-photon polymerization in small focal volume.
Keywords :
high-speed optical techniques; laser beam effects; micro-optics; optical fabrication; optical focusing; optical losses; optical polymers; polymerisation; two-photon processes; 390 nm; 80 fs; Al/sub 2/O/sub 3/:Ti; Ti:sapphire laser pulses; high-performance microoptical devices; incident laser light; liquid resin; low-loss; photo-initiators; photolithography; small focal volume; two-photon polymerization technique; Laser beams; Nonlinear optics; Optical device fabrication; Optical losses; Optical polymers; Optical pulses; Optical refraction; Optical waveguides; Resins; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the
Conference_Location :
Long Beach, CA, USA
Print_ISBN :
1-55752-706-7
DOI :
10.1109/CLEO.2002.1034240
