DocumentCode
227385
Title
Elemental analysis of the surface during plasma irradiation
Author
Mamedov, N.V. ; Kurnaev, V.A. ; Sinelnikov, D.N. ; Kolodko, Dobrynya V.
Author_Institution
Moscow Eng. & Phys. Inst., Nat. Nucl. Res. Univ., Moscow, Russia
fYear
2014
fDate
June 30 2014-July 4 2014
Firstpage
1
Lastpage
2
Abstract
In-situ non-destructive method of surface analysis at plasma/ion treatment is presented. A differentially pumped energy analyzer is used for ion scattering and ionized recoil spectroscopy under grazing incidence conditions in automated ion mass monochromator. Build in Penning plasma source is used for plasma/ion treatment of targets.
Keywords
mass spectroscopic chemical analysis; nondestructive testing; plasma materials processing; plasma sources; surface treatment; Penning plasma source; automated ion mass monochromator; differentially pumped energy analyzer; grazing incidence conditions; in-situ nondestructive method; ion scattering; ion treatment; ionized recoil spectroscopy; plasma irradiation; plasma treatment; surface elemental analysis; Gases; Impurities; Ions; Plasmas; Radiation effects; Spectroscopy; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electron Sources Conference (IVESC), 2014 Tenth International
Conference_Location
St. Petersburg
Print_ISBN
978-1-4799-5770-5
Type
conf
DOI
10.1109/IVESC.2014.6892031
Filename
6892031
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