• DocumentCode
    227394
  • Title

    Energy dispersion of sputtered particles

  • Author

    Moos, Evgeny N. ; Savushkin, Oleg V.

  • Author_Institution
    Ryazan State Univ. named for S. Esenin, Ryazan, Russia
  • fYear
    2014
  • fDate
    June 30 2014-July 4 2014
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    The exchange energy process in system “surface - nuclear particle” in model of pair interactions is considered. The possibility of such description is shown from the first order of the perturbation theory. The sputtered atom particle energy dispersion depends on a ratio of the incident and surface masses, the energy of the probe particles, and an exchange field distance.
  • Keywords
    perturbation theory; sputtering; atom particle energy dispersion; energy dispersion; exchange energy process; exchange field distance; pair interaction model; perturbation theory; sputtered particles; surface mass; surface nuclear particle system; Dispersion; Educational institutions; Electronic mail; Probes; Surface treatment; Surface waves; Wave functions;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electron Sources Conference (IVESC), 2014 Tenth International
  • Conference_Location
    St. Petersburg
  • Print_ISBN
    978-1-4799-5770-5
  • Type

    conf

  • DOI
    10.1109/IVESC.2014.6892036
  • Filename
    6892036
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=227394