MEMS Courses for Undergraduates

Author

Siahmakoun, Azad ; Miller, Aaron

Author_Institution

Dept. of Phys. & Opt. EngineeringMicro-Nanoscale Devices & Syst., Rose-Hulman Inst. of Technol., Terre Haute, IN

fYear

2008

fDate

13-16 July 2008

Firstpage

85

Lastpage

88

Abstract

Two MEMS courses have been developed for all science and engineering majors to learn basics of design, fabrication, and characterization of MEMS devices. The first course introduction to MEMS is to introduce the essentials of microfabrication technique by making heat actuators for laboratory component. While the second course, Advanced Topics in MEMS, covers in depth modeling, process flow, photolithography, and microfluidics with projects for the laboratory components.

Keywords

educational courses; electronic engineering education; microfluidics; micromechanical devices; photolithography; MEMS device design; depth modeling; heat actuators; microfabrication technique; microfluidics; photolithography; process flow; undergraduate courses; Biomedical optical imaging; Chemistry; Design engineering; Fabrication; Laboratories; Microelectromechanical devices; Micromachining; Micromechanical devices; Optical devices; Physics;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial

Conference_Location

Louisville, KY

Print_ISBN

978-1-4244-2484-9

Electronic_ISBN

978-1-4244-2485-6

Type

conf

DOI

10.1109/UGIM.2008.29

Filename

4573207