DocumentCode
2274007
Title
Theoretical Efficiency of a Microfabricated Knudsen Pump
Author
Copic, Davor ; Brehob, Ellen ; McNamara, Shamus
Author_Institution
Univ. of Louisville, Louisville, KY
fYear
2008
fDate
13-16 July 2008
Firstpage
107
Lastpage
110
Abstract
This paper describes the derivation of the maximum theoretical efficiency for a Knudsen pump. The Knudsen pump functions on the principle of thermal transpiration in rarified gas conditions. The pump requires only a temperature difference between the inlet and the outlet to operate. The rarified gas conditions are established by having the pump channel´s characteristic dimensions, i.e. the diameter or height, smaller than the mean free path of the gas being pumped. The efficiency is shown to follow all of the trends imposed by the principle of thermal transpiration. The maximum obtainable efficiency for any gas approaches the ratio of the ideal gas constant divided by the specific heat capacity, which is achieved at a very high temperature ratio.
Keywords
Knudsen flow; micro fabricated Knudsen pump; rarified gas conditions; thermal transpiration; Apertures; Chemicals; Cooling; Gas chromatography; Gases; Hydraulic diameter; Microelectromechanical devices; Robustness; Spectroscopy; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial
Conference_Location
Louisville, KY
Print_ISBN
978-1-4244-2484-9
Electronic_ISBN
978-1-4244-2485-6
Type
conf
DOI
10.1109/UGIM.2008.34
Filename
4573212
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