• DocumentCode
    2274007
  • Title

    Theoretical Efficiency of a Microfabricated Knudsen Pump

  • Author

    Copic, Davor ; Brehob, Ellen ; McNamara, Shamus

  • Author_Institution
    Univ. of Louisville, Louisville, KY
  • fYear
    2008
  • fDate
    13-16 July 2008
  • Firstpage
    107
  • Lastpage
    110
  • Abstract
    This paper describes the derivation of the maximum theoretical efficiency for a Knudsen pump. The Knudsen pump functions on the principle of thermal transpiration in rarified gas conditions. The pump requires only a temperature difference between the inlet and the outlet to operate. The rarified gas conditions are established by having the pump channel´s characteristic dimensions, i.e. the diameter or height, smaller than the mean free path of the gas being pumped. The efficiency is shown to follow all of the trends imposed by the principle of thermal transpiration. The maximum obtainable efficiency for any gas approaches the ratio of the ideal gas constant divided by the specific heat capacity, which is achieved at a very high temperature ratio.
  • Keywords
    Knudsen flow; micro fabricated Knudsen pump; rarified gas conditions; thermal transpiration; Apertures; Chemicals; Cooling; Gas chromatography; Gases; Hydraulic diameter; Microelectromechanical devices; Robustness; Spectroscopy; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial
  • Conference_Location
    Louisville, KY
  • Print_ISBN
    978-1-4244-2484-9
  • Electronic_ISBN
    978-1-4244-2485-6
  • Type

    conf

  • DOI
    10.1109/UGIM.2008.34
  • Filename
    4573212