Title :
Symmetrical erosion patterns on single-crystal silicon cathodes after high-voltage vacuum breakdowns
Author :
Onischenko, S.A. ; Nefyodtsev, E.V. ; Batrakov, A.V. ; Proskurovsky, D.I.
Author_Institution :
Inst. of High Current Electron., Tomsk, Russia
fDate :
June 30 2014-July 4 2014
Abstract :
We investigated the erosion traces which were forming on a surface of mono-crystalline silicon plates, which were used as cathodes of vacuum gaps. The plates had two surface orientations: 100 and 111. Single vacuum discharges were generated by short voltage pulses (10-80 ns, 200 kV) in gaps of 1-2 mm long. Each discharge leads to appearance a few symmetrical erosion patterns oriented along crystallographic directions. It is supposed that acoustoelectric and micro-plastic phenomena play an important role in figures formation.
Keywords :
acoustoelectric effects; cathodes; elemental semiconductors; silicon; vacuum breakdown; wear; Si; acoustoelectric phenomena; crystallographic directions; erosion traces; few symmetrical erosion patterns; figure formation; high-voltage vacuum breakdowns; microplastic phenomena; monocrystalline silicon plate surface; short voltage pulses; single vacuum discharges; single-crystal silicon cathodes; surface orientations; time 10 ns to 80 ns; vacuum gaps; voltage 200 kV; Anodes; Cathodes; Discharges (electric); Etching; Silicon; Surface discharges; Vacuum breakdown;
Conference_Titel :
Vacuum Electron Sources Conference (IVESC), 2014 Tenth International
Conference_Location :
St. Petersburg
Print_ISBN :
978-1-4799-5770-5
DOI :
10.1109/IVESC.2014.6892047
