Title :
Synthesis of Single-Wall Carbon Nanotubes by Atmospheric Thermal CVD
Author :
Ting, Jyh-Hua ; Lyu, Jhih-Yuan ; Huang, Fuang-Yuan ; Li, Tsung-Lung ; Hsu, Cho-Lun ; Liu, Chien-Wei
Author_Institution :
Nat. Nano Device Labs., Hsinchu
Abstract :
At the growth temperature at and above 700degC as well as C2H4 flow rate of 20 seem,, carbon nanotubes (CNTs) were synthesized on the SiO2 substrates dip-coated with Co acetate only. The fine dispersion of Co particles was caused by a strong interaction between metal acetate and SiO2 support. Due to the high process (atmospheric) pressure, the reduced catalytic activity of Co could not assist CNT growth for the Co-Mo bimetallic catalysts on oxide surface. CNTs could not be synthesized with the addition of nitrogen to the carrier gas, either. It was inferred that the carrier gas of pure hydrogen is essential to inhibit the formation of cobalt oxides due to the trace oxygen in the atmospheric furnace and thus sustain the activity of Co particles. With the catalyst of 0.02 wt% Co acetate, highly selective growth of high-purity SWNTs was attained at the growth temperature at and above 800degC by atmospheric thermal CVD. The SWNT diameter measured by AFM confirmed the value determined from the RBM of Raman spectrum and Bandow´s relationship.
Keywords :
atomic force microscopy; carbon nanotubes; chemical vapour deposition; dip coating; organic compounds; silicon compounds; Bandow relationship; Raman spectrum; SiO2; atmospheric furnace; atmospheric thermal CVD; atomic force microscopy; bimetallic catalysts; catalytic activity; cobalt acetate; dip-coating; particle fine dispersion; single-wall carbon nanotubes; Atomic force microscopy; Carbon nanotubes; Chemical vapor deposition; Cobalt; Dip coating; Ethanol; Furnaces; Hydrogen; Nitrogen; Temperature;
Conference_Titel :
University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial
Conference_Location :
Louisville, KY
Print_ISBN :
978-1-4244-2484-9
Electronic_ISBN :
978-1-4244-2485-6
DOI :
10.1109/UGIM.2008.48