Title :
Strain-Induced Three-Dimensional Microfabrication for Advanced Antenna Architectures
Author :
Senousy, Y.M. ; Moiseeva, E.V. ; Harnett, C.K.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Louisville, Louisville, KY
Abstract :
Recently, techniques known as ´micro-origami´ or ´strain architecture´ have emerged for fabrication of out-of-plane micro-and nanostructures by relaxation of a pair of strain- mismatched thin films. Applications of such structures include optical reflectors, actuators and microcoils for antenna applications.
Keywords :
antennas; metamaterials; thin films; 3D microfabrication; advanced antenna architectures; micro-origami architecture; strain architecture; strain-mismatched thin films; Capacitive sensors; Coils; Computer architecture; High-resolution imaging; Lithography; Optical films; Optical imaging; Optical sensors; Substrates; Transistors;
Conference_Titel :
University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial
Conference_Location :
Louisville, KY
Print_ISBN :
978-1-4244-2484-9
Electronic_ISBN :
978-1-4244-2485-6
DOI :
10.1109/UGIM.2008.65
