Title :
Multitip field emitters for electron devices operating in technical vacuum
Author :
Sominski, G.G. ; Taradaev, E.P. ; Tumareva, T.A. ; Mishin, M.V. ; Stepanova, A.N.
Author_Institution :
St.-Petersburg State Polytech. Univ., St. Petersburg, Russia
fDate :
June 30 2014-July 4 2014
Abstract :
Multitip field emitters are attractive for application in vacuum electronics. But they are not yet widely used due to the difficulty of ensuring its high durability in technical vacuum. The authors have developed a special coatings protecting the emitter from the damaging effects of ion bombardment. The operation of multitip silicon field emitters with protective coatings is described in this report.
Keywords :
elemental semiconductors; field emission; protective coatings; silicon; vacuum microelectronics; Si; damaging effects; electron devices; ion bombardment; multitip silicon field emitters; protective coatings; vacuum electronics; Cathodes; Coatings; Crystallography; Current measurement; Silicon; Vacuum systems;
Conference_Titel :
Vacuum Electron Sources Conference (IVESC), 2014 Tenth International
Conference_Location :
St. Petersburg
Print_ISBN :
978-1-4799-5770-5
DOI :
10.1109/IVESC.2014.6892083
