DocumentCode
227487
Title
Multitip field emitters for electron devices operating in technical vacuum
Author
Sominski, G.G. ; Taradaev, E.P. ; Tumareva, T.A. ; Mishin, M.V. ; Stepanova, A.N.
Author_Institution
St.-Petersburg State Polytech. Univ., St. Petersburg, Russia
fYear
2014
fDate
June 30 2014-July 4 2014
Firstpage
1
Lastpage
2
Abstract
Multitip field emitters are attractive for application in vacuum electronics. But they are not yet widely used due to the difficulty of ensuring its high durability in technical vacuum. The authors have developed a special coatings protecting the emitter from the damaging effects of ion bombardment. The operation of multitip silicon field emitters with protective coatings is described in this report.
Keywords
elemental semiconductors; field emission; protective coatings; silicon; vacuum microelectronics; Si; damaging effects; electron devices; ion bombardment; multitip silicon field emitters; protective coatings; vacuum electronics; Cathodes; Coatings; Crystallography; Current measurement; Silicon; Vacuum systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electron Sources Conference (IVESC), 2014 Tenth International
Conference_Location
St. Petersburg
Print_ISBN
978-1-4799-5770-5
Type
conf
DOI
10.1109/IVESC.2014.6892083
Filename
6892083
Link To Document