Apparatus for studying the three-dimensional structure of thin films by electron holography

Author

Trofimov, Vasily V. ; Karpov, A.G. ; Antonov, Stepan R.

Author_Institution

St.-Peterburg State Univ., St. Petersburg, Russia

fYear

2014

fDate

June 30 2014-July 4 2014

Firstpage

1

Lastpage

2

Abstract

Electron holographic apparatus is intended to obtain and analyze three-dimensional structure of organic and inorganic films, fibers and macromolecules with thickness up to 10 nm. The main units of the apparatus is a compact ultrahigh-vacuum chamber, the sample positioning system, a point coherent source of electrons and system of registration and processing of holographic images. Apparatus control and processing of holographic images using a computer system, for which we developed the appropriate software.

Keywords

electron holography; macromolecules; nanostructured materials; thin films; compact ultrahigh-vacuum chamber; computer system; electron holographic apparatus; electron holography; fibers; holographic image processing; holographic image registration; inorganic films; macromolecules; organic films; point coherent electron source; sample positioning system; software; thin films; three-dimensional structure; Atomic layer deposition; Cathodes; Electron beams; Electron microscopy; Interference; Metals;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Electron Sources Conference (IVESC), 2014 Tenth International

Conference_Location

St. Petersburg

Print_ISBN

978-1-4799-5770-5

Type

conf

DOI

10.1109/IVESC.2014.6892091

Filename

6892091