Title :
On the grain boundary barrier height and threshold voltage of undoped polycrystalline silicon thin-film transistors
Author :
He, Hongyu ; Deng, Wanling ; He, Jin ; Zheng, Xueren
Author_Institution :
Shenzhen SOC Key Lab., Peking Univ., Shenzhen, China
Abstract :
Based on the surface potential calculation by the 1-D poisson´s equation, the grain boundary barrier height at channel surface is derived accurately assuming an exponential density of trap states (DOS) within the energy gap. The threshold voltage is defined as the gate voltage when the free charge density is equal to the trapped charge density at the surface of channel, corresponding to the depleted region width near the grain boundary is equal to one half of grain size. The grain size dependent threshold voltage is verified by the available experimental data. A new approach to extract the threshold voltage is also presented from the transconductance by the improvement on D. C. Moschou et al´s work.
Keywords :
Poisson equation; elemental semiconductors; grain boundaries; grain size; silicon; surface potential; thin film transistors; 1D Poisson equation; DOS; Si; channel surface; energy gap; exponential density of trap states; free charge density; gate voltage; grain boundary barrier height; grain size; surface potential calculation; threshold voltage; transconductance; trapped charge density; undoped polycrystalline silicon thin-film transistor; Electric potential; Grain boundaries; Grain size; Logic gates; Thin film transistors; Threshold voltage;
Conference_Titel :
Junction Technology (IWJT), 2012 12th International Workshop on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4673-1258-5
Electronic_ISBN :
978-1-4673-1256-1
DOI :
10.1109/IWJT.2012.6212833