DocumentCode :
227520
Title :
Cold-cathode, high-current electron source using Micro Hollow Cathode Discharge
Author :
Wong, Michel C. ; Hunt, Charles E. ; Quan Hu
Author_Institution :
ECE Dept., Univ. of California, Davis, Davis, CA, USA
fYear :
2014
fDate :
June 30 2014-July 4 2014
Firstpage :
1
Lastpage :
2
Abstract :
A Micro Hollow Cathode Discharge (MHCD), a technology well known as an ion source, is adapted, using Argon, to be a cold-cathode electron beam source with high total current. Cylindrical cathodes of various internal diameters, used to confine the plasma, have been investigated. The `pd´ gas breakdown scaling rules necessitate an increase in argon pressure with decreasing tube diameter. As the tube diameter approaches micrometer regime, the operating pressure approaches 1 ATM, with the result of the current density increasing dramatically. The plasma electrons are formed into a beam using an electrostatic lens. Measured data and beam-focusing simulations indicate that using a 15mm-diameter cathode, operating at 300 mTorr, a current density of 1.5Acm-2 can be obtained. Data from 3mm and 9mm MHCDs have also been measured. To enable using the MHCD as the electron resource for a microwave tube amplifier, a focus system has been designed, incorporating an electrostatic lens with three stages, ranging up to 1 kV. The lens stages incorporate differential pumping in order to reduce the pressure to the order of 10-7 Pa for microwave tube. The apertures between stages are positioned at the minimal-diameter points of the beam, in order to enable maximum pressure isolation between stages.
Keywords :
argon; cathodes; current density; electron beams; electron sources; electrostatic lenses; glow discharges; ion sources; microwave tubes; Ar; MHCD; argon pressure; beam focusing; cold cathode; current density; cylindrical cathodes; differential pumping; electron beam source; electron resource; electrostatic lens; gas breakdown scaling; high current electron source; ion source; microhollow cathode discharge; microwave tube amplifier; plasma electrons; pressure 300 mtorr; size 15 mm; tube diameter; Cathodes; Current density; Electron tubes; Lenses; Plasma measurements; Plasmas;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Electron Sources Conference (IVESC), 2014 Tenth International
Conference_Location :
St. Petersburg
Print_ISBN :
978-1-4799-5770-5
Type :
conf
DOI :
10.1109/IVESC.2014.6892102
Filename :
6892102
Link To Document :
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