DocumentCode :
2275633
Title :
Development of quantum hall array resistance standards at NMIJ
Author :
Oe, T. ; Kaneko, N. ; Urano, C. ; Itatani, T. ; Ishii, H. ; Kiryu, S.
Author_Institution :
Nat. Metrol. Inst. of Japan, Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba
fYear :
2008
fDate :
8-13 June 2008
Firstpage :
20
Lastpage :
21
Abstract :
An experimental device of quantum Hall array resistance standards with a nominal value close to 10 kOmega on the i = 2 plateau and a parallel array of two Hall bars have been developed. The latter array clearly shows quantized Hall resistance of a quarter value of the von Klitzing constant, RK on the i = 2 plateau.
Keywords :
Hall effect devices; magnetic variables measurement; magnetoresistance; measurement standards; quantum Hall effect; Hall bars; NMIJ primary standard; QHR device; quantized Hall resistance measurement; quantum Hall array resistance standards; von Klitzing constant; Bars; Calibration; Dry etching; Fabrication; Gallium arsenide; Gold; Insulation; Metrology; Polyimides; Standards development;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2008. CPEM 2008. Conference on
Conference_Location :
Broomfield, CO
Print_ISBN :
978-1-4244-2399-6
Electronic_ISBN :
978-1-4244-2400-9
Type :
conf
DOI :
10.1109/CPEM.2008.4574632
Filename :
4574632
Link To Document :
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