DocumentCode
2275666
Title
Miniaturized spectrometer technologies
Author
Antila, Jarkko
Author_Institution
Photonic Devices & Meas. Solutions, VTT Tech. Res. Centre of Finland, Espoo, Finland
fYear
2010
fDate
12-16 July 2010
Firstpage
1
Lastpage
4
Abstract
VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 μm and to enlarge apertures of devices for increased throughput. This paper reviews VTT´s surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation.
Keywords
Fabry-Perot interferometers; infrared spectrometers; micro-optics; micromachining; ultraviolet spectrometers; Fabry-Perot interferometer; MEMS; miniaturized spectrometer; surface micromachining; Detectors; Micromechanical devices; Mirrors; Optical device fabrication; Optical films; Optical filters; Optical imaging;
fLanguage
English
Publisher
ieee
Conference_Titel
Information Optics (WIO), 2010 9th Euro-American Workshop on
Conference_Location
Helsinki
Print_ISBN
978-1-4244-8226-9
Electronic_ISBN
978-1-4244-8227-6
Type
conf
DOI
10.1109/WIO.2010.5582486
Filename
5582486
Link To Document