DocumentCode :
2275735
Title :
Analytic modeling of AC response to FET-level elements for CLY optimization
Author :
Karve, Gauri ; Logan, Ron ; Greene, Brian ; Winslow, Jonathan
Author_Institution :
IBM Syst. & Technol., Hopewell Junction, NY, USA
fYear :
2012
fDate :
15-17 May 2012
Firstpage :
11
Lastpage :
15
Abstract :
Minimizing circuit AC delay variations while maintaining power/performance is key for achieving high yielding products. The present work discusses an analytic model based approach for aligning the fundamental-FET electrical control and circuit-speed variability applied towards product screening. Such a model is proven to be effective in a manufacturing environment for predicting delay variation, and identifying the limiting process issues that drive our capability to achieve success in maximizing yield. The ability to understand circuit delay as it relates back to basic device measurements provides an ability to improve standard work in semiconductor manufacturing and realize continuous productivity enhancement.
Keywords :
field effect transistors; semiconductor device models; AC response; CLY optimization; FET-level elements; analytic modeling; circuit AC delay variations; circuit-speed variability; device measurements; fundamental-FET electrical control; high yielding products; productivity enhancement; semiconductor manufacturing; Capacitance; Delay; FETs; Hardware; Integrated circuit modeling; Mathematical model; Predictive models; Ring oscillator delay variability; cmos process variability; device centering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI
Conference_Location :
Saratoga Springs, NY
ISSN :
1078-8743
Print_ISBN :
978-1-4673-0350-7
Type :
conf
DOI :
10.1109/ASMC.2012.6212860
Filename :
6212860
Link To Document :
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