Title :
Feedback loop design for an electrostatic voltmeter
Author :
Denison, Timothy A. ; Shafran, John S. ; Lundberg, Kent H.
Author_Institution :
Analog Devices, Cambridge, MA
Abstract :
The integration of MEMS sensors and interface circuitry has yielded low-cost, high-performance instruments with excellent reliability. In inertial sensing, deterministic electrical waveforms are applied to a MEMS capacitive element to determine an unknown deflection. The inverse of this measurement method can also be exploited: the MEMS element can be deterministically modulated to measure an unknown electrical variable. This paper presents the design of a non-contact electrostatic voltmeter using a MEMS-based electrostatic field meter
Keywords :
capacitive sensors; electric field measurement; electric fields; micromechanical devices; voltmeters; MEMS capacitive element; MEMS sensors; MEMS-based electrostatic field meter; deterministic electrical waveforms; electrostatic voltmeter; feedback loop design; inertial sensing; interface circuitry; Circuits; Conductors; Electric variables measurement; Electrostatic measurements; Feedback loop; Instruments; Micromechanical devices; Vehicle detection; Voltage; Voltmeters;
Conference_Titel :
American Control Conference, 2006
Conference_Location :
Minneapolis, MN
Print_ISBN :
1-4244-0209-3
Electronic_ISBN :
1-4244-0209-3
DOI :
10.1109/ACC.2006.1656383
