The atmospheric plasma of the ground during the doping process trend analysis study on the current pass

Recently, the wavelength of the ultraviolet region examined laser light by a photochemical reaction, while dopant decomposition of impurities by dissolving the examined part by laser doping technique for applying the method is being developed. However, the laser technique and an ion doping process is too expensive and complicated equipment is required for mass production and the profitability of thin films by ion implantation, and ineffective for the treatment of damage to the subsequent post-annealing is required to have the weakness that the thermal diffusion doping methods are quantitative doping amount of production compared to the control is difficult and time limits.