DocumentCode :
2275911
Title :
Directional Growth and Oxide Electrodes in CSD-based PZT Films
Author :
Grader, G.S. ; Shturman, I. ; Kabla, M. ; Etin, A. ; Shter, G.E.
Author_Institution :
Technion, Haifa
fYear :
2007
fDate :
27-31 May 2007
Firstpage :
176
Lastpage :
179
Abstract :
PbZr0.52Ti0.48O3 (PZT) was deposited on three substrates: Pt/Ti/SiO2/Si, PbTiO3/Pt/Ti/SiO2/Si and LaNiO3/SiO2/Si. The final PZT film morphology, orientation, piezoelectric and ferroelectric properties were investigated and related to the substrate type.
Keywords :
dielectric hysteresis; ferroelectric thin films; lead compounds; liquid phase deposition; permittivity; piezoelectricity; CSD; LaNiO3-SiO2-Si; PZT films; PbTiO3-Pt-Ti-SiO2-Si; PbZr0.52Ti0.48O3; Pt-Ti-SiO2-Si; Si; chemical solution deposition; dielectric constant; ferroelectric hysteresis loop; ferroelectric properties; film morphology; oxide electrodes; piezoelectric properties; Dielectric measurements; Electric variables measurement; Electrodes; Fatigue; Ferroelectric films; Ferroelectric materials; Morphology; Piezoelectric films; Semiconductor films; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
ISSN :
1099-4734
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
Type :
conf
DOI :
10.1109/ISAF.2007.4393205
Filename :
4393205
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2275911
بازگشت