• DocumentCode
    2275911
  • Title

    Directional Growth and Oxide Electrodes in CSD-based PZT Films

  • Author

    Grader, G.S. ; Shturman, I. ; Kabla, M. ; Etin, A. ; Shter, G.E.

  • Author_Institution
    Technion, Haifa
  • fYear
    2007
  • fDate
    27-31 May 2007
  • Firstpage
    176
  • Lastpage
    179
  • Abstract
    PbZr0.52Ti0.48O3 (PZT) was deposited on three substrates: Pt/Ti/SiO2/Si, PbTiO3/Pt/Ti/SiO2/Si and LaNiO3/SiO2/Si. The final PZT film morphology, orientation, piezoelectric and ferroelectric properties were investigated and related to the substrate type.
  • Keywords
    dielectric hysteresis; ferroelectric thin films; lead compounds; liquid phase deposition; permittivity; piezoelectricity; CSD; LaNiO3-SiO2-Si; PZT films; PbTiO3-Pt-Ti-SiO2-Si; PbZr0.52Ti0.48O3; Pt-Ti-SiO2-Si; Si; chemical solution deposition; dielectric constant; ferroelectric hysteresis loop; ferroelectric properties; film morphology; oxide electrodes; piezoelectric properties; Dielectric measurements; Electric variables measurement; Electrodes; Fatigue; Ferroelectric films; Ferroelectric materials; Morphology; Piezoelectric films; Semiconductor films; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
  • Conference_Location
    Nara
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-1334-8
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2007.4393205
  • Filename
    4393205
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2275911