Title :
Epitaxial growth of Pt and Ir thin films on a SrTiO3(001) substrate
Author :
Fujisawa, Hironori ; Kume, Masayoshi ; Shimizu, Masaru ; Kotaka, Yasutoshi ; Honda, Koichiro
Author_Institution :
Univ. of Hyogo, Hyogo
Abstract :
We investigated epitaxial growth of Pt and Ir thin films on SrTO3(001) (STO)(100) single crystal by rf-sputtering. When Pt and Ir were directly deposited on STO(IOO), coherently grown Pt and Ir films with an atomically flat surface cannot be obtained due to the generation of misfit dislocations. On the other hand, when 0.5 nm-thick Ir layer was inserted into the interface between Pt films and STO, the generation of misfit dislocations at the interface was drastically reduced and coherently grown Pt films with an atomic step and terrace structure were successfully obtained on STO substrate.
Keywords :
X-ray diffraction; atomic force microscopy; dislocations; epitaxial layers; iridium; lattice constants; metallic thin films; platinum; sputter deposition; strontium compounds; surface structure; transmission electron microscopy; AFM; Ir; Pt; SrTiO3; TEM; XRD; atomically flat surface; epitaxial growth; epitaxial thin films; lattice parameters; misfit dislocations; rf sputtering; size 0.5 nm; thin films; Atomic force microscopy; Atomic layer deposition; Crystallization; Electrodes; Epitaxial growth; Ferroelectric films; Ferroelectric materials; Lattices; Substrates; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393207
