Title :
Dielectric Characterization of Barium strontium titanate (BST) Films Prepared on Cu Substrate By Aerosol Deposited Method
Author :
Oh, Se-Woong ; Park, Jae-Hyuk ; Akedo, Jun
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol., Ibaraki
Abstract :
Polycrystalline barium strontium titanate (BaxSr1-xTiO3, BST) films were directly prepared on copper substrate using aerosol deposition method (ADM) at room-temperature. We investigated the relationships between their properties such as dielectric constant and tunability, and Ba content in BaxSr1-xTiO3 (x=1.0, 0.6, 0.4) films. At the frequency of 100 kHz, the dielectric constant of the as-deposited BST film were 100, 201, and 72 at x = 1.0, 0.6, 0.4, respectively. After annealing in N2 gas ambient at 600degC for 10 min, the dielectric constant and dielectric loss of BST (x=0.6) film were 380 and 2.0 x 10-3 at 100 kHz, respectively. Moreover, BST (x=0.6) film even showed a high tunability of 30 % at an applied electric field of 300 kV cm-1.
Keywords :
aerosols; annealing; barium compounds; dielectric losses; dielectric thin films; permittivity; strontium compounds; BaSrTiO3; Cu; aerosol deposited method; annealing; barium strontium titanate films; copper substrate; dielectric constant; dielectric loss; frequency 100 kHz; temperature 293 K to 298 K; temperature 600 C; time 10 min; Aerosols; Barium; Binary search trees; Copper; Dielectric constant; Dielectric losses; Dielectric substrates; Frequency; Strontium; Titanium compounds;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393215
