Characterization of structural effects in ferroelectric tunable capacitors using barium strontium titanate thin films

Author

Nakaiso, T. ; Takeshima, Y. ; Kageyama, K. ; Takagi, H. ; Sakabe, Y.

Author_Institution

Murata Manuf. Co. Ltd., Kyoto

fYear

2007

fDate

27-31 May 2007

Firstpage

214

Lastpage

215

Abstract

We fabricated two types of ferroelectric tunable capacitors, which were metal-insulator-metal structure (MIM) and interdigital electrodes structure (IDE) using (Ba_0.7Sr_0.3)TiO₃ (BST) thin films prepared by chemical solution decomposition (CSD) method. These films showed grained structure and crystalline properties were randomly oriented. Dielectric tunabilty of MIM structures was -52%/6V and that of IDE structures was -50%/15 V, at 2GHz respectively. Quality factor of IDE structures was higher than that of MIM structures.

Keywords

MIM structures; barium compounds; crystal microstructure; decomposition; electrodes; ferroelectric capacitors; ferroelectric thin films; liquid phase deposition; strontium compounds; thin film capacitors; (Ba_0.7Sr_0.3)TiO₃; CSD method; IDE; MIM structure; barium strontium titanate thin films; chemical solution decomposition method; crystalline properties; dielectric tunabilty; ferroelectric tunable capacitors; frequency 2 GHz; grain structure; interdigital electrodes; metal-insulator-metal structure; quality factor; thin film preparation; Barium; Binary search trees; Dielectric thin films; Electrodes; Ferroelectric materials; MIM capacitors; Metal-insulator structures; Strontium; Titanium compounds; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on

Conference_Location

Nara

ISSN

1099-4734

Print_ISBN

978-1-4244-1334-8

Electronic_ISBN

1099-4734

Type

conf

DOI

10.1109/ISAF.2007.4393218

Filename

4393218