Title :
Characterization of structural effects in ferroelectric tunable capacitors using barium strontium titanate thin films
Author :
Nakaiso, T. ; Takeshima, Y. ; Kageyama, K. ; Takagi, H. ; Sakabe, Y.
Author_Institution :
Murata Manuf. Co. Ltd., Kyoto
Abstract :
We fabricated two types of ferroelectric tunable capacitors, which were metal-insulator-metal structure (MIM) and interdigital electrodes structure (IDE) using (Ba0.7Sr0.3)TiO3 (BST) thin films prepared by chemical solution decomposition (CSD) method. These films showed grained structure and crystalline properties were randomly oriented. Dielectric tunabilty of MIM structures was -52%/6V and that of IDE structures was -50%/15 V, at 2GHz respectively. Quality factor of IDE structures was higher than that of MIM structures.
Keywords :
MIM structures; barium compounds; crystal microstructure; decomposition; electrodes; ferroelectric capacitors; ferroelectric thin films; liquid phase deposition; strontium compounds; thin film capacitors; (Ba0.7Sr0.3)TiO3; CSD method; IDE; MIM structure; barium strontium titanate thin films; chemical solution decomposition method; crystalline properties; dielectric tunabilty; ferroelectric tunable capacitors; frequency 2 GHz; grain structure; interdigital electrodes; metal-insulator-metal structure; quality factor; thin film preparation; Barium; Binary search trees; Dielectric thin films; Electrodes; Ferroelectric materials; MIM capacitors; Metal-insulator structures; Strontium; Titanium compounds; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393218
