Title :
Longitudinal Displacement Measurement of Lead Zirconate Titanate Thick Films Deposited on Silicon substrates
Author :
Iijima, Toru ; Okino, H. ; Yamamoto, T.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba
Abstract :
10-mum-thick PZT films were deposited on the Pt/Ti/SiO2/Si substrates, and 20-to 500-mum-diameter PZT thick film disks on the Si substrate were fabricated. the butterfly shape displacement curves of the top side, bottom side and subtraction of bottom side from top side were measured with twin-beam interferometer, and the effect of the disk diameter on these displacements were compared with FEM simulation. the clamping effect is eliminated when the ratio of the PZT disk diameter, d, to the PZT film thickness, t, is less than three, that is dlt < 3, for 10-mum-thick PZT film. therefore, the actual longitudinal displacement of the PZT films can be evaluated for dlt < 3.
Keywords :
lead compounds; liquid phase deposition; piezoelectric thin films; FEM simulation; PZT; PZT films; Pt-Ti-SiO2-Si; chemical solution deposition process; clamping effect; lead zirconate titanate thick films; piezoelectric film; silicon substrates; size 10 mum; size 20 mum to 500 mum; twin-beam interferometer; Atomic force microscopy; Clamps; Displacement measurement; Piezoelectric films; Semiconductor films; Shape measurement; Silicon; Substrates; Thick films; Titanium compounds;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393223
