DocumentCode :
2276261
Title :
DC bias dependent shift of resonance frequencies in BST thin film membranes
Author :
Noeth, A. ; Yamada, T. ; Sherman, V. ; Muralt, P. ; Tangantsev, A. ; Setter, N.
Author_Institution :
Ecole Polytech. Fed. de Lausanne, Lausanne
fYear :
2007
fDate :
27-31 May 2007
Firstpage :
236
Lastpage :
238
Abstract :
DC bias dependent acoustic resonance phenomena have been observed in micromachined tunable thin film capacitors based on Ba0.3Sr0.7TiO3 (BST) thin films. The antiresonance frequency is only weakly DC bias dependent, whereas the resonance frequency exhibits a strong dependence on the applied dc bias. The resonance frequency shifted by 0.8% for a frequency of about 3.44 GHz and an applied of 333 KV/cm. At the same time the electromechanical coupling constant kt 2 increased to 1.8%. The experimental observations correlate well with the theoretical predictions derived from the free energy P expansion using Landau theory.
Keywords :
acoustic resonance; barium compounds; electromechanical effects; free energy; membranes; strontium compounds; thin film capacitors; Ba0.3Sr0.7TiO3; Landau theory; acoustic resonance phenomena; antiresonance frequency; electromechanical coupling constant; free energy; micromachined tunable thin film capacitors; resonance frequency; thin film membranes; Binary search trees; Biomembranes; Capacitors; Electrodes; Piezoelectric films; Piezoelectric materials; Pulsed laser deposition; Resonance; Resonant frequency; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
ISSN :
1099-4734
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
Type :
conf
DOI :
10.1109/ISAF.2007.4393226
Filename :
4393226
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2276261
بازگشت