DC bias dependent shift of resonance frequencies in BST thin film membranes

Author

Noeth, A. ; Yamada, T. ; Sherman, V. ; Muralt, P. ; Tangantsev, A. ; Setter, N.

Author_Institution

Ecole Polytech. Fed. de Lausanne, Lausanne

fYear

2007

fDate

27-31 May 2007

Firstpage

236

Lastpage

238

Abstract

DC bias dependent acoustic resonance phenomena have been observed in micromachined tunable thin film capacitors based on Ba_0.3Sr_0.7TiO₃ (BST) thin films. The antiresonance frequency is only weakly DC bias dependent, whereas the resonance frequency exhibits a strong dependence on the applied dc bias. The resonance frequency shifted by 0.8% for a frequency of about 3.44 GHz and an applied of 333 KV/cm. At the same time the electromechanical coupling constant k_t ² increased to 1.8%. The experimental observations correlate well with the theoretical predictions derived from the free energy P expansion using Landau theory.

Keywords

acoustic resonance; barium compounds; electromechanical effects; free energy; membranes; strontium compounds; thin film capacitors; Ba_0.3Sr_0.7TiO₃; Landau theory; acoustic resonance phenomena; antiresonance frequency; electromechanical coupling constant; free energy; micromachined tunable thin film capacitors; resonance frequency; thin film membranes; Binary search trees; Biomembranes; Capacitors; Electrodes; Piezoelectric films; Piezoelectric materials; Pulsed laser deposition; Resonance; Resonant frequency; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on

Conference_Location

Nara

ISSN

1099-4734

Print_ISBN

978-1-4244-1334-8

Electronic_ISBN

1099-4734

Type

conf

DOI

10.1109/ISAF.2007.4393226

Filename

4393226