Formation of Barium Strontium Titanate Thin Films via Electrophoretic Deposition Process

Synthesis of crystalline barium strontium titanate (Ba_0.6Sr_0.4TiO₃) nanoparticles and subsequent formation of thin films have been carried out. The crystalline products were confirmed by X-ray diffractometry. Uniform Ba_0.6Sr_0.4TiO₃ thin films were formed by using electrophoretic deposition method (EPD) under 0.3 ~ 5 V dc bias for 10 min ~ 1 h. Ba_0.6Sr_0.4TiO₃ nanoparticles having an average crystallite size of 20 ~ 50 nm and Ba_0.6Sr_0.4TiO₃ thin films with thickness of 150 nm ~ 4 mum were obtained. Scanning electron microscope (SEM) and transmission electron microscope (TEM) were used to characterize the morphologies of nanoparticles and thin films. The results show that EPD process route is a rapid, cost effective alternative to form Ba_0.6Sr_0.4TiO₃ thin films.