Title :
Accurate measurement of local surface temperature with thermal imagers
Author :
Yamada, Y. ; Ishii, Jun
Author_Institution :
Nat. Metrol. Inst. of Japan, Tsukuba, Japan
Abstract :
Two dimensional thermal imagers are becoming widely applied to monitoring heat dissipation in designing and fabricating electronic devices. However, the true local surface temperature is usually not obtained without rigorous calibration, due to difficulties such as unknown emissivity, poor imaging quality of the optics, and background radiation. In this presentation, a method to overcome these issues are presented, which makes use of the emissivity distribution pattern detected by the thermal imager by superimposing a modulated background radiation. In particular, in this article, the size-of-source effect caused by the poor imaging quality of the imager is shown to be overcome by the proposed method.
Keywords :
cooling; emissivity; infrared imaging; temperature measurement; electronic device fabrication; emissivity distribution pattern; heat dissipation monitoring; local surface temperature measurement; modulated background radiation; size-of-source effect; two dimensional thermal imagers; Containers; Heating; Imaging; Reflectivity; Temperature; Temperature measurement; Temperature sensors; Thermal imagers, radiation thermometry, emissivity free, size; background radiation; electronic device; of-source effect; thermal measurement;
Conference_Titel :
Semiconductor Thermal Measurement and Management Symposium (SEMI-THERM), 2014 30th Annual
Conference_Location :
San Jose, CA
DOI :
10.1109/SEMI-THERM.2014.6892220