DocumentCode
2276375
Title
A noise-shaping accelerometer interface circuit for two-chip implementation
Author
Kajita, Tetsuya ; Moon, Un-Ku ; Temes, Gabor C.
Author_Institution
Dept. of Electr. & Comput. Eng., Oregon State Univ., Corvallis, OR, USA
Volume
4
fYear
2000
fDate
2000
Firstpage
337
Abstract
This paper introduces a new architecture for sensor interface circuits using a delta-sigma modulator. The three-level force feedback allows the use of a digital compensator to stabilize the loop. A 3rd-order delta-sigma structure shapes the opamp noise and allows two-chip implementation with high loop gain at low frequencies
Keywords
accelerometers; capacitive sensors; compensation; delta-sigma modulation; force feedback; accelerometer interface circuit; capacitive sensor; delta-sigma modulator; digital compensator; loop gain; third-order delta-sigma structure; three-level force feedback; two-chip implementation; Acceleration; Accelerometers; Capacitance; Capacitive sensors; Capacitors; Circuits; Force feedback; Micromachining; Noise shaping; Sensor phenomena and characterization;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 2000. Proceedings. ISCAS 2000 Geneva. The 2000 IEEE International Symposium on
Conference_Location
Geneva
Print_ISBN
0-7803-5482-6
Type
conf
DOI
10.1109/ISCAS.2000.858757
Filename
858757
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