Title :
A noise-shaping accelerometer interface circuit for two-chip implementation
Author :
Kajita, Tetsuya ; Moon, Un-Ku ; Temes, Gabor C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Oregon State Univ., Corvallis, OR, USA
Abstract :
This paper introduces a new architecture for sensor interface circuits using a delta-sigma modulator. The three-level force feedback allows the use of a digital compensator to stabilize the loop. A 3rd-order delta-sigma structure shapes the opamp noise and allows two-chip implementation with high loop gain at low frequencies
Keywords :
accelerometers; capacitive sensors; compensation; delta-sigma modulation; force feedback; accelerometer interface circuit; capacitive sensor; delta-sigma modulator; digital compensator; loop gain; third-order delta-sigma structure; three-level force feedback; two-chip implementation; Acceleration; Accelerometers; Capacitance; Capacitive sensors; Capacitors; Circuits; Force feedback; Micromachining; Noise shaping; Sensor phenomena and characterization;
Conference_Titel :
Circuits and Systems, 2000. Proceedings. ISCAS 2000 Geneva. The 2000 IEEE International Symposium on
Conference_Location :
Geneva
Print_ISBN :
0-7803-5482-6
DOI :
10.1109/ISCAS.2000.858757