Title :
Improved sustainability of an existing fab operation through reduced energy consumption
Author :
Yeaman, Don ; Rogerson, Ron
Author_Institution :
Technol., M+W Group, San Francisco, CA, USA
Abstract :
Spansion, in collaboration with M+W Group, undertook a study to improve the energy efficiency of their Fab 25 operations. The study identified facility and Fab tool upgrade projects that will reduce the overall site energy consumption by more than 5% with an ROI time horizon within the corporate guidelines. These upgrade projects are underway and will result in annual operating cost reductions of more than $800K per year when the entire project list is complete. This paper describes the methodology employed and the opportunities identified.
Keywords :
energy conservation; energy consumption; Fab 25 operations; Fab tool upgrade projects; M+W Group; ROI time horizon; Spansion; annual operating cost reductions; corporate guidelines; energy consumption; energy efficiency; sustainability; Companies; Cooling; Energy conservation; Energy consumption; Energy efficiency; Water conservation; Water heating;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI
Conference_Location :
Saratoga Springs, NY
Print_ISBN :
978-1-4673-0350-7
DOI :
10.1109/ASMC.2012.6212897