• DocumentCode
    2276687
  • Title

    Diffusion Properties of Point Defects in Barium Strontium Titanate Thin Films

  • Author

    Morito, K. ; Suzuki, T. ; Kishi, H. ; Sakaguchi, I. ; Ohashi, N. ; Haneda, H.

  • Author_Institution
    Taiyo Yuden Co. Ltd., Takasaki
  • fYear
    2007
  • fDate
    27-31 May 2007
  • Firstpage
    312
  • Lastpage
    315
  • Abstract
    The relation between the diffusion behavior of hydrogen and the electrical properties of (Ba, Sr)TiO3 thin-film capacitors was investigated using thermal desorption spectroscopy and secondary ion mass spectroscopy analysis.
  • Keywords
    barium compounds; diffusion; ferroelectric capacitors; ferroelectric thin films; interstitials; secondary ion mass spectra; strontium compounds; thermally stimulated desorption; thin film capacitors; BaSrTiO3; barium strontium titanate thin films; diffusion properties; electrical properties; ferroelectric perovskite-type titanate thin films; interstitial hydrogen defects; point defects; secondary ion mass spectroscopy analysis; thermal desorption spectroscopy; thin-film capacitors; Barium; Binary search trees; Capacitors; Degradation; Dielectric thin films; Hydrogen; Mass spectroscopy; Strontium; Titanium compounds; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
  • Conference_Location
    Nara
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-1334-8
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2007.4393251
  • Filename
    4393251
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2276687