DocumentCode :
2276687
Title :
Diffusion Properties of Point Defects in Barium Strontium Titanate Thin Films
Author :
Morito, K. ; Suzuki, T. ; Kishi, H. ; Sakaguchi, I. ; Ohashi, N. ; Haneda, H.
Author_Institution :
Taiyo Yuden Co. Ltd., Takasaki
fYear :
2007
fDate :
27-31 May 2007
Firstpage :
312
Lastpage :
315
Abstract :
The relation between the diffusion behavior of hydrogen and the electrical properties of (Ba, Sr)TiO3 thin-film capacitors was investigated using thermal desorption spectroscopy and secondary ion mass spectroscopy analysis.
Keywords :
barium compounds; diffusion; ferroelectric capacitors; ferroelectric thin films; interstitials; secondary ion mass spectra; strontium compounds; thermally stimulated desorption; thin film capacitors; BaSrTiO3; barium strontium titanate thin films; diffusion properties; electrical properties; ferroelectric perovskite-type titanate thin films; interstitial hydrogen defects; point defects; secondary ion mass spectroscopy analysis; thermal desorption spectroscopy; thin-film capacitors; Barium; Binary search trees; Capacitors; Degradation; Dielectric thin films; Hydrogen; Mass spectroscopy; Strontium; Titanium compounds; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
ISSN :
1099-4734
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
Type :
conf
DOI :
10.1109/ISAF.2007.4393251
Filename :
4393251
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2276687
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