Title :
Comparison of fourier and non-fourier heat transfer in nanoscale semiconductor structures
Author :
Janicki, Marcin ; De Mey, G. ; Zubert, Mariusz ; Napieralski, A.
Author_Institution :
Dept. of Microelectron. & Comput. Sci., Lodz Univ. of Technol., Lodz, Poland
Abstract :
This paper is devoted to the demonstration of fundamental differences between the Fourier and non-Fourier heat transfer mechanisms in nanoscale silicon structures. One-dimensional parabolic and hyperbolic heat equation is solved for a simple test structure. Then, the obtained solutions in frequency and time domains are compared.
Keywords :
Fourier analysis; elemental semiconductors; frequency-domain analysis; heat transfer; hyperbolic equations; nanostructured materials; parabolic equations; silicon; time-domain analysis; Fourier heat transfer mechanism; Si; frequency domain solution; nanoscale semiconductor structure; nonFourier heat transfer mechanism; one-dimensional hyperbolic heat equation; one-dimensional parabolic heat equation; structure testing; time domain solution; Equations; Heat sinks; Heat transfer; Heating; Impedance; Mathematical model; Steady-state; Fourier heat equation; Nanoscale heat transfer, non;
Conference_Titel :
Semiconductor Thermal Measurement and Management Symposium (SEMI-THERM), 2014 30th Annual
Conference_Location :
San Jose, CA
DOI :
10.1109/SEMI-THERM.2014.6892240