DocumentCode :
2276939
Title :
Nanostructuring in submicron-level waveguides with femtosecond laser pulses
Author :
Ming Li ; Ishizuka, M. ; Xinbing Liu ; Sugimoto, Y. ; Ikeda, N. ; Asakawa, K.
Author_Institution :
Panasonic Boston Lab., Cambridge, MA, USA
fYear :
2002
fDate :
24-24 May 2002
Firstpage :
659
Abstract :
Summary form only given. In early 2000, we demonstrated the capability of a femtosecond laser with a UV wavelength of 387 nm to drill 200-250 nm holes in Si-on-SiO/sub 2/ substrate. It met the spacing requirement for 1D waveguide photonic crystal. We then took the next step to study drilling small holes on actual waveguides Promising drilling results on waveguides were achieved, and a forbidden transmission zone or photonic band gap was discovered from the laser-machined waveguides during our preliminary measurement. Our best drilling results were obtained recently. On 600 nm wide waveguides, we drilled 8 holes (diameter /spl sim/ 200 nm) with pitch size of 400 nm. Reasonable uniformity in hole-size and hole-shape was obtained, and holes were pretty well positioned.
Keywords :
high-speed optical techniques; laser beam machining; micromachining; nanotechnology; optical fabrication; optical waveguides; photonic band gap; photonic crystals; 1D waveguide photonic crystal; 200 nm; 387 nm; 400 nm; 600 nm; Si-SiO/sub 2/; Si-on-SiO/sub 2/ substrate; UV wavelength; femtosecond laser pulses; forbidden transmission zone; hole-shape; hole-size; laser-machined waveguides; nanostructuring; photonic band gap; pitch size; small hole drilling; spacing requirement; submicron-level waveguides; Cameras; Drilling; Fiber lasers; Laser beams; Laser modes; Optical fiber polarization; Optical pulses; Photonic crystals; Waveguide discontinuities; Waveguide lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the
Conference_Location :
Long Beach, CA, USA
Print_ISBN :
1-55752-706-7
Type :
conf
DOI :
10.1109/CLEO.2002.1034448
Filename :
1034448
Link To Document :
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