DocumentCode
2277136
Title
Modeling and analysis of a novel composite-current driven synchronous permanent magnet planar motor
Author
Kou, Baoquan ; Zhang, Lu ; Li, Liyi
Author_Institution
Inst. of Electromagn. & Electron. Technol., Harbin Inst. of Technol., Harbin, China
fYear
2011
fDate
20-23 Aug. 2011
Firstpage
1
Lastpage
4
Abstract
A novel composite-current driven synchronous permanent magnet planar motor(CCDSPMPM) used for lithography machine in the future is proposed in this paper. The operation principle and structure of this planar motor are introduced. Analytical solutions to determine the field of the motor are deduced. The correctness of the solutions is validated by comparison of the results obtained by analytic method and by finite element method. Based on the analytic solutions, the electromagnetic forces and back-EMF of the unit planar motor are also deduced in this paper.
Keywords
finite element analysis; lithography; permanent magnet motors; synchronous motors; back-EMF; composite-current driven synchronous permanent magnet planar motor; electromagnetic forces; finite element method; lithography machine; unit planar motor; Air gaps; Coils; Electromagnetic forces; Magnetic flux; Permanent magnets; Planar motors; Windings;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Machines and Systems (ICEMS), 2011 International Conference on
Conference_Location
Beijing
Print_ISBN
978-1-4577-1044-5
Type
conf
DOI
10.1109/ICEMS.2011.6073629
Filename
6073629
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