DocumentCode
2277634
Title
Excellent Ferroelectricity of Thin Poly(Vinylidene Fluoride-Trifluoroetylene) Copolymer Films and Low Voltage Operation of Capacitors and Diodes
Author
Fujisaki, Sumiko ; Fujisaki, Yoshihisa ; Ishiwara, Hiroshi
Author_Institution
Tokyo Inst. of Technol., Yokohama
fYear
2007
fDate
27-31 May 2007
Firstpage
487
Lastpage
489
Abstract
Characteristics of MFM (metal-ferroelectrics-metal) capacitors and MFIS (metal-ferroelectrics-insulator-semiconductor) diodes with P(VDF-TrFE) copolymer films thinner than 100 nm were investigated. The films were prepared by spin cast process and were annealed at 140degC in air for crystallization. The ferroelectric properties are equivalent to those of oxide ferroelectrics even under low voltage or high frequency operation.
Keywords
MFIS structures; MIS devices; annealing; crystallisation; elemental semiconductors; ferroelectric capacitors; ferroelectric thin films; ferroelectricity; gold; polymer blends; polymer films; semiconductor diodes; silicon; silicon compounds; Au; MFIS diodes; MFM capacitors; SiO2-Si; annealing; crystallization; ferroelectric properties; ferroelectricity; low voltage operation; metal-ferroelectrics-insulator-semiconductor; metal-ferroelectrics-metal structure; spin casting; temperature 140 degC; thin poly(vinylidene fluoride trifluoroetylene) copolymer films; Capacitors; Dielectrics and electrical insulation; Diodes; Ferroelectric films; Ferroelectric materials; Flash memory; Low voltage; Magnetic field induced strain; Magnetic force microscopy; Polarization;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location
Nara
ISSN
1099-4734
Print_ISBN
978-1-4244-1334-8
Electronic_ISBN
1099-4734
Type
conf
DOI
10.1109/ISAF.2007.4393307
Filename
4393307
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