Coupled-field modeling of microdevices and microsystems

Currently strong efforts are being made to build simulation platforms for the predictive simulation of microelectromechanical devices and microsystems (MEMS) as cost-effective and time-saving alternative to the traditional experimental approach. Already today the rapid progress in microsystems technology is strongly supported by MEMS-specific modeling methodologies and dedicated simulation tools constituting a "virtual laboratory" on the computer, which enables the visualization and detailed analysis of the operating behavior of single microdevices as well as their collaborative function in a microsystem. In this context, one of the most important aspects is the consistent treatment of coupled fields and coupled energy and signal domains required for deriving macromodels of microsystems from the continuous field level. To this end, we discuss practicable methodologies for setting up physically-based consistent microdevice and full system models for the effort-economizing and yet accurate numerical simulation of micro-mechatronical components and systems.