Microwave resonance plasma source for surface modification technologies at atmospheric pressure

Author

Taube, A. ; Demyashev, G. ; Siores, E.

Author_Institution

Ind. Res. Inst. Swinburne, Swinburne Univ. of Technol., Melbourne, Vic., Australia

Volume

2

fYear

2001

fDate

3-6 Dec. 2001

Firstpage

783

Abstract

This paper extends the range of applications for microwave energy to create a plasma source based on the resonance phenomenon and operated at atmospheric pressure. The atmospheric-pressure process is advantageous for plasma-assisted coating deposition and plasma surface treatment. The novel Microwave Resonance Plasma Torch (MRPT) using the tunable TM₀₁₃ mode cylindrical resonant cavity and working at 2.45 GHz was tested for surface engineering applications. The MRPT was successfully approved with different carrier gases (N₂, Ar, He) for creation of thermal plasma. The feasibility of using the Microwave Resonance Plasma Torch for nitriding/oxinitriding of Ti, 304 and 316 stainless steel, and 5140 steel with pure N₂ and with air (the mixture of N₂ 78 vol%+O₂ 21 vol%) was confirmed.

Keywords

cavity resonators; magnetrons; nitridation; plasma deposition; plasma production; plasma torches; surface treatment; 2.45 GHz; Ar; He; N/sub 2/; atmospheric pressure; carrier gases; cylindrical resonant cavity; microwave resonance plasma source; nitriding; oxynitridation; plasma torch; plasma-assisted coating deposition; pressure plasma surface; surface engineering; surface modification technologies; thermal plasma; tunable TM/sub 013/ mode; Atmospheric-pressure plasmas; Coatings; Microwave technology; Plasma applications; Plasma sources; Resonance; Steel; Surface engineering; Surface treatment; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2001. APMC 2001. 2001 Asia-Pacific

Conference_Location

Taipei, Taiwan

Print_ISBN

0-7803-7138-0

Type

conf

DOI

10.1109/APMC.2001.985487

Filename

985487