Title :
Microwave resonance plasma source for surface modification technologies at atmospheric pressure
Author :
Taube, A. ; Demyashev, G. ; Siores, E.
Author_Institution :
Ind. Res. Inst. Swinburne, Swinburne Univ. of Technol., Melbourne, Vic., Australia
Abstract :
This paper extends the range of applications for microwave energy to create a plasma source based on the resonance phenomenon and operated at atmospheric pressure. The atmospheric-pressure process is advantageous for plasma-assisted coating deposition and plasma surface treatment. The novel Microwave Resonance Plasma Torch (MRPT) using the tunable TM 013 mode cylindrical resonant cavity and working at 2.45 GHz was tested for surface engineering applications. The MRPT was successfully approved with different carrier gases (N 2, Ar, He) for creation of thermal plasma. The feasibility of using the Microwave Resonance Plasma Torch for nitriding/oxinitriding of Ti, 304 and 316 stainless steel, and 5140 steel with pure N 2 and with air (the mixture of N 2 78 vol%+O 2 21 vol%) was confirmed.
Keywords :
cavity resonators; magnetrons; nitridation; plasma deposition; plasma production; plasma torches; surface treatment; 2.45 GHz; Ar; He; N/sub 2/; atmospheric pressure; carrier gases; cylindrical resonant cavity; microwave resonance plasma source; nitriding; oxynitridation; plasma torch; plasma-assisted coating deposition; pressure plasma surface; surface engineering; surface modification technologies; thermal plasma; tunable TM/sub 013/ mode; Atmospheric-pressure plasmas; Coatings; Microwave technology; Plasma applications; Plasma sources; Resonance; Steel; Surface engineering; Surface treatment; Testing;
Conference_Titel :
Microwave Conference, 2001. APMC 2001. 2001 Asia-Pacific
Conference_Location :
Taipei, Taiwan
Print_ISBN :
0-7803-7138-0
DOI :
10.1109/APMC.2001.985487
