Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application

Author

Tiedke, S. ; Prume, K. ; Schmitz-Kempen, T.

Author_Institution

aixACCT Syst. GmbH, Aachen

fYear

2007

fDate

27-31 May 2007

Firstpage

702

Lastpage

702

Abstract

The electrical and electromechanical properties of piezoelectric thin films were measured using different measurement procedures including a new method which combines the measurement of both the effective longitudinal and transverse piezoelectric coefficients on the same sample under precisely defined homogeneous mechanical strain utilizing a 4-point bending setup. Stress and corresponding strain distributions in the film were verified by finite element simulations.

Keywords

micromechanical devices; permittivity; piezoelectric materials; piezoelectric thin films; piezoelectricity; stress analysis; 4-point bending setup; MEMS; effective longitudinal piezoelectric coefficient; effective transverse piezoelectric coefficient; electrical properties; electromechanical properties; finite element simulations; homogeneous mechanical strain; microelectromechanical systems; piezoelectric thin films; strain distribution; stress distribution; Control systems; Electromechanical sensors; Microelectromechanical systems; Micromechanical devices; Piezoelectric films; Piezoelectric materials; Sensor arrays; Sensor phenomena and characterization; Strain measurement; Stress measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on

Conference_Location

Nara

ISSN

1099-4734

Print_ISBN

978-1-4244-1334-8

Electronic_ISBN

1099-4734

Type

conf

DOI

10.1109/ISAF.2007.4393376

Filename

4393376