Title :
Preparation of (001) oriented Pb(Zr,Ti)O3 thin films and their piezoelectric applications
Author :
Fujii, E. ; Takayama, R. ; Nomura, K. ; Murata, A. ; Hirasawa, T. ; Tomozawa, A. ; Fujii, S. ; Kamada, T. ; Torii, H.
Author_Institution :
Matsushita Electr. Ind. Co., Ltd., Kyoto
Abstract :
Preparation of (001) oriented Pb(Zr,Ti)O3 (PZT) thin films and their applications to a sensor and actuators were investigated. The (001) oriented PZT thin films were epitaxicially grown on (100)Pt/(100)MgO single crystal substrates by rf-magnetron sputtering. The PZT thin films on (100)Pt/(100)MgO buffer layer/glass substrates and (11 l)Pt/Ti/Si substrates also had high (001) orientation. All of these thin films showed the excellent piezoelectric properties without a poling treatment. These PZT thin films were applied to the angular rate sensor with a toning fork for a car navigation system, the dual-stage actuator for positioning a magnetic head of high-density hard disk drive (HDD) and the actuator for a inkjet printer head.
Keywords :
angular velocity measurement; crystal orientation; lead compounds; magnetic heads; piezoceramics; piezoelectric actuators; sputtering; (001) oriented PZT thin films; MgO single crystal substrates; PZT; angular rate sensor; car navigation system; dual-stage actuator; epitaxical growth; high-density hard disk drive; inkjet printer head; magnetic head; piezoelectric actuators; piezoelectric sensor; poling treatment; rf-magnetron sputtering; toning fork; Actuators; Buffer layers; Glass; Magnetic films; Magnetic heads; Piezoelectric films; Semiconductor thin films; Sputtering; Substrates; Thin film sensors;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393377
