Temperature Properties of PZT Actuated High-Speed Metal-Based Optical Resonant Scanners

High speed metal-based optical scanning devices were successfully fabricated in combination with piezoelectric thick films directly deposited by the aerosol deposition method (ADM) and specially designed stainless steel frame. A large optical scanning angle (41deg) was achieved at a high resonance frequency (28.24 kHz) in ambient air without vacuum packaging. The well-polished metal-based mirror has good flatness of less than 105 nm, which is lower than omega4. Sepcially, we carried out in the range from -20´C to 80´C at environmental chamber to investigate temperature properties of metal-based optical scanner. The scanning angle is linearly increased with increase of temperature, while the resonant frequency is linearly decreased as temperature increased. Also, we compared with performance of metal-based optical scanner driven by bulk PZT and AD-PZT thick films.