Title :
Evaluation on Mass Sensitivity of SAW Sensors for Different Piezoelectric Materials Using Finite Element Analysis
Author :
Abdollahi, Amir ; Jiang, Zhongwei ; Arabshahi, Sayyed Alireza
Author_Institution :
Yamaguchi Univ., Yamaguchi
Abstract :
The mass sensitivity of the piezoelectric surface acoustic wave (SAW) sensors is an important factor in the selection of the best gravimetric sensors for different applications. To determine this value without facing the practical problems and consuming long theoretical calculation time, we have shown that the mass sensitivity of SAW sensors can be calculated by a simple 3D finite element analysis (FEA) using ANSYS platform. The FEA data were used to calculate the wave propagation speed, surface particle displacements and wave energy distribution on different cuts of various piezoelectric materials. Meanwhile, to calculate more accurate results from FEA data, wave reflection problem was considered in the analysis. The results are used to provide a simple method for evaluation of their mass sensitivities.
Keywords :
finite element analysis; piezoelectric materials; surface acoustic wave sensors; 3D finite element analysis; ANSYS; FEA; SAW sensors; gravimetric sensors; piezoelectric materials; piezoelectric surface acoustic wave sensors; surface particle displacements; Acoustic sensors; Acoustic waves; Anisotropic magnetoresistance; Differential equations; Electromechanical sensors; Finite element methods; Piezoelectric materials; Resonant frequency; Surface acoustic waves; Surface waves;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393386
