Title :
A batch-processed vacuum-sealed capacitive pressure sensor
Author :
Chavan, Abhijeet V. ; Wise, Kensall D.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
This paper reports a multi-transducer vacuum-sealed capacitive barometric pressure sensor. The device operates with a resolution of 25 mTorr over a pressure range from 600 to 800 Torr. The sensitivity is 27 fF/Torr (3000 ppm/Torr). The TCO at 750 Torr is 3969 ppm/°C and the TCS is about 1000 ppm/°C. The device uses a single layer of polysilicon both for sealing to the glass and for transfer of the glass electrode in the reference cavity to the outside world. The device is read out using a switched-capacitor charge integrator and an on-chip compensation capacitor
Keywords :
capacitance measurement; compensation; elemental semiconductors; microsensors; pressure sensors; seals (stoppers); silicon; 600 to 800 torr; Si; barometric pressure sensor; microsensors; multi-transducer sensor; on-chip compensation capacitor; reference cavity; resolution; sensitivity; switched-capacitor charge integrator; vacuum-sealed capacitive pressure sensor; vacuum-sealed device; Bonding; Capacitive sensors; Capacitors; Electrodes; Glass; Mechanical sensors; Ocean temperature; Seals; Silicon; Transducers;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635737
