A batch-processed vacuum-sealed capacitive pressure sensor

Author

Chavan, Abhijeet V. ; Wise, Kensall D.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1449

Abstract

This paper reports a multi-transducer vacuum-sealed capacitive barometric pressure sensor. The device operates with a resolution of 25 mTorr over a pressure range from 600 to 800 Torr. The sensitivity is 27 fF/Torr (3000 ppm/Torr). The TCO at 750 Torr is 3969 ppm/°C and the TCS is about 1000 ppm/°C. The device uses a single layer of polysilicon both for sealing to the glass and for transfer of the glass electrode in the reference cavity to the outside world. The device is read out using a switched-capacitor charge integrator and an on-chip compensation capacitor

Keywords

capacitance measurement; compensation; elemental semiconductors; microsensors; pressure sensors; seals (stoppers); silicon; 600 to 800 torr; Si; barometric pressure sensor; microsensors; multi-transducer sensor; on-chip compensation capacitor; reference cavity; resolution; sensitivity; switched-capacitor charge integrator; vacuum-sealed capacitive pressure sensor; vacuum-sealed device; Bonding; Capacitive sensors; Capacitors; Electrodes; Glass; Mechanical sensors; Ocean temperature; Seals; Silicon; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635737

Filename

635737