Title :
Characteristics of tube-type piezoelectric motor fabricated by aerosol deposition
Author :
Yoon, W.H. ; Hahn, B.D. ; Ryu, J.H. ; Choi, J.J. ; Park, D.S. ; Choi, H.O.
Author_Institution :
Korea Inst. of Machinery & Mater., Changwon
Abstract :
Tube-type piezoelectric motor having a volume of 2times2times10 mm3 was fabricated by aerosol deposition of PZT powder on the square-shaped titanium alloy tube. With applying two channels driving voltage the stator generates two orthogonal bending vibration modes which makes wobbling motion of the stator at the resonance frequency. At the frequency of 76.4 kHz with 60 Vpp, rotation speed of the stator was about 1900 rpm and the speed of the stator was increased linearly with applying voltage.
Keywords :
aerosols; lead compounds; piezoelectric motors; powders; stators; titanium; PZT powder; PZT-Ti; aerosol deposition; channel driving voltage; frequency 76.4 kHz; orthogonal bending vibration modes; resonance frequency; rotation speed; square-shaped titanium alloy tube; stator; tube-type piezoelectric motor; voltage 60 V; wobbling motion; Aerosols; Optical films; Optical sensors; Piezoelectric materials; Resonance; Resonant frequency; Rotation measurement; Stators; Velocity measurement; Voltage;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393399