Inverse opals for fluid delivery in electronics cooling systems

We report the fabrication and fluid flow characterization of a class of open-cell copper foams known as copper inverse opals (CIOs). This material has finely controlled structure at the pore level, which may enable its use in microscale heat exchangers for microelectronics cooling. We fabricated CIOs by electrodepositing copper around a sacrificial template of packed polystyrene microspheres. We then removed the CIOs from their substrates and used electroetching to vary the pore structure and porosity. We characterized the geometry of the samples at various stages of fabrication with visual inspection and image analysis of scanning electron micrographs. We characterized the permeability with a through-plane flow rig and developed computational models for fluid flow in ideal face-centered cubic and hexagonally close-packed unit cells. Here we report the simulated and experimentally measured values of permeability. We also report experimental challenges that arise from the microscale dimensions of the samples.