Title :
Crystallizing compound film on plastics by ion irradiation in plasma
Author :
Sakudo, N. ; Ikenaga, N. ; Matsui, K. ; Sakumoto, N. ; Kishi, Y. ; Yajima, Z.
Author_Institution :
Kanazawa Instn. of Technol., Hakusan, Japan
Abstract :
Micro machines are expected in advanced medical instruments for micro surgery. Typical materials for the actuators are shape memory alloys such as TiNi(titanium nickel) and piezoelectric compounds such as PZT(lead zirconate titanate). For future medical application the materials will be required to be deposited directly on the surfaces of plastics in the form of crystalline thin film, since most medical instruments such as catheters for blood vessel surgery are made of polymeric plastics. Then the film will be finished into some micro actuators.
Keywords :
ion beam effects; lead compounds; nickel alloys; piezoelectric materials; shape memory effects; thin films; titanium alloys; PZT; TiNi; crystallizing compound film; ion irradiation; medical instruments; micro surgery; micromachines; piezoelectric compounds; plastic surfaces; shape memory alloys; Compounds; Films; Instruments; Plasma temperature; Plastics; Radiation effects;
Conference_Titel :
Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS), 2014 IEEE 41st International Conference on
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4799-2711-1
DOI :
10.1109/PLASMA.2014.7012606
