DocumentCode :
2279287
Title :
Silicon lattice-parameter measurements with centimeter x-ray interferometry
Author :
Ferroglio, Luca ; Mana, Giovanni ; Massa, Enrico
Author_Institution :
INRiM-Ist. Naz. di Ricerca Metrologica, Turin
fYear :
2008
fDate :
8-13 June 2008
Firstpage :
410
Lastpage :
411
Abstract :
A combined x-ray and optical interferometer capable of centimeter displacements has been realized to measure the lattice parameter of a 28Si crystal to within a 3 x 10-9 relative uncertainty. This paper relates the results of test measurements carried out to assess the capabilities of the new apparatus.
Keywords :
elemental semiconductors; interferometry; lattice constants; light interferometers; silicon; 28Si; centimeter X-ray interferometry; centimeter displacement; optical interferometer; silicon lattice-parameter; Adaptive optics; Crystals; Displacement measurement; Interference; Lattices; Optical feedback; Optical interferometry; Optical sensors; Prototypes; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2008. CPEM 2008. Conference on
Conference_Location :
Broomfield, CO
Print_ISBN :
978-1-4244-2399-6
Electronic_ISBN :
978-1-4244-2400-9
Type :
conf
DOI :
10.1109/CPEM.2008.4574827
Filename :
4574827
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2279287
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