A simple impedance correction for on-wafer TAN calibration techniques

A general method initially developed for the estimation of the S-parameters measurement errors caused by non-ideal calibration standards, is applied for the correction of the reference impedance of 7- term through-attenuator-network (TAN) calibration procedures such as thru-attenuator reflect (TAR). Deviations from ideal calibration elements are measured on-wafer using the multiline TRL method and can be taken into account without the need for a precise determination of the reference impedance (lumped elements).