Novel Solid-State Spatial Light Modulator on Integrated Circuits for High-Speed Applications with Electro-Optic Thin Film

Novel solid-state spatial light modulator (SLM) is developed. An electro-optic spatial ligNovel solid-state spatial light modulator (SLM) is developed. An electro-optic spatial light modulator (EOSLM) has advantages of high-speed operation, solid-state structure and easy integration with silicon LSIs in comparison with liquid crystal displays (LCD) and micro-electro-mechanical system (MEMS) displays. We propose a kind of Fabry-Perot type planer optical pixel to achieve high optical efficiency and high aperture ratio. The use of sol-gel technique makes it possible to fabricate optically smooth 800nm-fhick lead zirconate titanate (PZT) films, which results in sufficient transparency for the three primary colors of visible light. The large electro-optic effects of Deltan=0.026 is confirmed, and the optical switching response of 7ns is fastest compared with that have ever been reported. The prototype 180x180 SLM chip, which includes pixel driver circuits, is fabricated and successfully demonstrated. ht modulator (EOSLM) has advantages of high-speed operation, solid-state structure and easy integration with silicon LSIs in comparison with liquid crystal displays (LCD) and micro-electro-mechanical system (MEMS) displays. We propose a kind of Fabry-Perot type planer optical pixel to achieve high optical efficiency and high aperture ratio. The use of sol-gel technique makes it possible to fabricate optically smooth 800nm-fhick lead zirconate titanate (PZT) films, which results in sufficient transparency for the three primary colors of visible light. The large electro-optic effects of Deltan=0.026 is confirmed, and the optical switching response of 7ns is fastest compared with that have ever been reported. The prototype 180x180 SLM chip, which includes pixel driver circuits, is fabricated and successfully demonstrated.