Title :
2D-spatiotemporal structure of ICP reactor
Author :
Kamimura, Kazutaka ; Makabe, T. ; Nakano, Naoki ; Nakagami, S.
Author_Institution :
Dept. of Electr. Eng., Keio Univ., Yokohama, Japan
Abstract :
Summary form only given. Practical application for material processing has given us a renewed interest in the study of an inductively coupled plasma (ICP) reactor to perform at large scale and high density plasma under low pressure condition. In previous papers, we modeled and discussed the one dimensional profiles, in order to understand the spatiotemporal discharge structure and sustaining mechanism of a collision dominated ICP reactor. We have now developed a two dimensional model considering radial and axial directions and discuss the spatiotemporal structure. The ICP reactor used in this study is a cylindrical tube in a diameter of 10 cm with three induction coils, tightly wound around the side wall. Each coil can be driven at 13.56 MHz independently.
Keywords :
plasma applications; plasma devices; 13.56 MHz; 2D-spatiotemporal structure; ICP reactor; axial directions; cylindrical tube; high density plasma; inductively coupled plasma reactor; low pressure; material processing; radial directions; spatiotemporal discharge structure; Coils; Electrons; Equations; Inductors; Large-scale systems; Magnetic fields; Nuclear and plasma sciences; Plasma applications; Space charge; Spatiotemporal phenomena;
Conference_Titel :
Plasma Science, 1995. IEEE Conference Record - Abstracts., 1995 IEEE International Conference on
Conference_Location :
Madison, WI, USA
Print_ISBN :
0-7803-2669-5
DOI :
10.1109/PLASMA.1995.531635
