Title :
Epitaxial Growth of PLZT Thin Films and their Electro-Optic Properties
Author :
Kosaka, Takuya ; Fukunaga, Daiki ; Uchiyama, Kiyoshi ; Shiosaki, Tadashi
Author_Institution :
Nara Inst. of Sci. & Technol. (NAIST), Nara
Abstract :
Epitaxially grown lanthanum-modified lead zirconate titanate (PLZT) thin films were deposited on r-cut sapphire substrates using a sol-gel method. The new deposition processes of methanol treatments brought high quality epitaxial growth of PLZT thin films. This film showed high electro-optic (EO) coefficients that were almost comparable to those of bulk PLZTs. We believe this advanced deposition technique will open the door for the future data communication systems with integrated electro-optic devices.
Keywords :
electro-optical devices; electro-optical effects; insulating thin films; lanthanum compounds; lead compounds; liquid phase epitaxial growth; sapphire; sol-gel processing; Al2O3; PLZT-Al2O3; deposition processes; electro-optic coefficients; epitaxial growth; integrated electro-optic devices; lanthanum; lead zirconate titanate thin films; methanol treatments; r-cut sapphire substrates; sol-gel method; Data communication; Electrooptic devices; Electrooptic modulators; Epitaxial growth; Methanol; Optical devices; Optical modulation; Sputtering; Substrates; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393422
